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J-Liner and Mo-Ring
mocvd07

1) Application equipment
· J-Liner: For 2”x19, 2”x31/37
· Mo Ring (Shield): k-465-i

2) Material
Molybdenum (99.95%)

3) Test Conditions
· Temperature: 1200 °C ~ 1400 °C
· Time: 100 lots (process lot)

4) Results
· Life time: more than 3 month
· Thermal expansion: none damage
· Crack: none

  

 

 

 

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